Low Profile 5-Axis Air Bearing Movement System for Semiconductor and Laser Processing

PI launched a brand new excessive efficiency 5-axis air bearing movement system on the latest SPIE Photonics West occasion, the world’s largest photonics convention, completely positioned proper within the again yard of Silicon Valley. Suited to excessive finish movement and positioning management purposes with nanometer precision, reminiscent of required in semiconductor front-end/back-end processes (wafer processing operation and meeting course of), the low profile multi-axis stage movement system is predicated on a mixture of PI’s profitable A-311 PIglide planar XY-air bearing stage, the distinctive low-profile A-532, a 3-axis Z-Tip-Tilt stage, and the A-826, a 6-axis excessive efficiency industrial movement controller.

Functions of the 5-axis air bearing stage embrace:

• Indexing, positioning
• Wafer/substrate take a look at and inspection
• Scanning, metrology
• ACS primarily based alignment options for manufacturing take a look at and packaging wants
• Direct-write lithography
• µLED fabrication
• Clear room purposes

Specs of the XYZ-Theta-X-Theta-Y system embrace: 300×300 mm linear journey, 5 mm Z-travel, 2° θX, θY rotation, nanometer decision. A video of the system in movement is accessible right here.

Why Air Bearings?

In comparison with mechanical, curler or ball bearing primarily based linear phases and rotary phases, air bearings are friction free and put on free and generate no particles throughout operation, making them clean-room suitable and very best for dynamic, 24/7 obligation cycle automation purposes. In an air bearing stage, the transferring platform glides on a skinny movie of air. This precept is also chargeable for the floor averaging impact that considerably improves geometric efficiency reminiscent of straightness and flatness in linear movement purposes whereas decreasing runout and wobble in rotary tables.

Working with You

PI’s in-house engineered options have enabled clients around the globe to extend their productiveness and technological benefit for five many years. With a big foundation of confirmed movement applied sciences and methodologies, PI is within the place to shortly modify present designs or present a totally custom-made OEM resolution to suit the precise necessities of your utility from sensors and piezo transducers to microscope nano-focus items, quick photonics alignment methods to multi-axis automation sub-systems.

Supply: http://www.pi-usa.us/en/