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Excessive Efficiency R-Theta 2-Axis Phases for Nanometer Precision Movement in Semiconductor and Laser Processing Functions

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R-Theta stage movement programs are higher suited to round, elliptic and spiral movement patterns than standard Cartesian 2-axis XY linear translation levels.

Excessive Efficiency R-Theta 2-Axis Phases for Nanometer Precision Movement in Semiconductor and Laser Processing Functions

Picture Credit score: PI (Physik Instrumente) LP

PI Gives Three Lessons of R-Theta Phases.

  1. For the best efficiency and precision, Air Bearing linear levels and air bearing rotary tables are used.
  2. Hybrid R-Theta programs use linear motor pushed levels with mechanical bearings and direct-drive air bearing rotary tables.
  3. Direct Drive linear motor levels and direct drive rotary tables with mechanical bearings are additionally out there.

R-Theta programs typically discover functions in precision laser / semiconductor functions as a consequence of larger throughput, larger precision and smaller footprint. Watch video of an all air bearing R-Theta levels.

Excessive Pace Movement Controllers

The levels are operated by PI’s ACS-based industrial movement controllers with ultra-fast triggers for synchronization with exterior tools corresponding to cameras, sensors or lasers. The quick controllers enable extremely exact triggering with 0.01% time tolerance between alerts. Set off alerts may be derived off absolute encoders or analog alerts (sin/cos encoder), enabling larger precision, safer, and simplified options as in comparison with outdated digital encoder-only triggers. With the fashionable PI movement controllers, a set off in an R-Theta configured system will work simply in addition to an XY place set off, with the coordinate specs merely outlined in polar coordinates.

Learn article on R-Theta levels

Working with You

PI’s in-house engineered options have enabled prospects all over the world to extend their productiveness and technological benefit for five a long time. With a big foundation of confirmed movement applied sciences and methodologies, PI is within the place to shortly modify present designs or present a totally personalized OEM answer to suit the precise necessities of your utility from sensors and piezo transducers to microscope nano-focus models, quick photonics alignment programs to multi-axis automation sub-systems.

Supply: http://www.pi-usa.us/en/

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